Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.
editors: Arthur H. Heuer, S. Joshua Jacobs
Bok Engelsk 1999
| Utgitt | Warrendale, Pa. : Materials Research Society , c1999
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|---|---|
| Omfang | IX, 246 s. : ill.
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| Emner | |
| ISBN | 1558994521. - 9781558994522
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