Ion implantation in semiconductors : science and technology : [proceedings of the Fourth International Conference on Ion Implantation in Semiconductors and Other Materials, held at the Osaka Chamber of Commerce and Industry, August 1974]
edited by Susumu Namba
Bok Engelsk 1975 International Conference on Ion Implantation in Semiconductors and Other Materials
Utgitt | New York : Plenum Press , c1975
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Omfang | XV, 742 s. : ill.
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Emner | |
ISBN | 030630841X
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