64- to 256-megabit reticle generation : technology, requirements and approaches : proceedings of a conference held 24 September 1993, Santa Clara, California
Gregory K. Hearn, editor ; sponsored by BACUS - the International Technical Group of SPIE dedicated to the advancement of photomask technology
Bok Engelsk 1994
| Utgitt | Bellingham, Wash. : SPIE Optical Engineering Press , c1994
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|---|---|
| Omfang | VII, 273 s. : ill.
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| Emner | |
| ISBN | 0819413577. - 0819413585
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