Materials for microlithography : radiation-sensitive polymers
Bok Engelsk 1984
| Annen tittel | |
|---|---|
| Utgitt | Washington, D.C. : American Chemical Society , 1984
|
| Omfang | viii, 494 s. : ill.
|
| Opplysninger | Bibliographic Level Mode of Issuance: Monograph
|
| Emner | |
| Dewey | |
| ISBN | 0841208719
|
