Handbook of sputter deposition technology : principles, technology and applications

by Kiyotaka Wasa, Shigeru Hayakawa
Bok · Engelsk · 1992

Utgitt	Park Ridge, N.J. : Noyes Publications , c1992
Omfang	xii, 304 s. : ill.
Emner	Cathode sputtering (Plating process) Thin films Sputtering Tynnfilmteknikk
ISBN	0815512805