Defects of high-κ gate dielectric stacks : nano-electronic semiconductor deviced
edited by Evgeni Gusev
Bok Engelsk 2006 NATO Advanced Research Workshop on Defects in Advanced High-κ Dielectric Nano-electronic Semiconductor Devices
Utgitt | Dordrecht : Springer , c2006
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Omfang | X, 492 s. : ill.
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Opplysninger | "Proceedings of the NATO Advanced Research Workshop on Defects in Advanced High-κ Dielectric Nano-electronic Semiconductor Devices, St.Petersburg, Russia, July 11-14, 2005" - Tittelbladets bakside
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Emner | |
ISBN | 1402043651
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