Microelectronics processing : inorganic materials characterization
Lawrence A. Casper, editor
Bok Engelsk 1986
Utgitt | Washington, D.C. : American Chemical Society , 1986
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Omfang | x, 443 s. : ill.
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Opplysninger | "Developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society."
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Emner | |
ISBN | 0841209340
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