Ion implantation in semiconductors and other materials : [proceedings of the third International Conference on Ion Implantation in Semiconductors and Other Materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, December 11-14, 1972]
edited by Billy L. Crowder
Bok Engelsk 1973 International Conference on Ion Implantation in Semiconductors and Other Materials
| Utgitt | New York : Plenum Press , c1973
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|---|---|
| Omfang | XII, 657 s. : ill.
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| Emner | |
| ISBN | 0306307561
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