Semiconductor fabrication : technology and metrology
Dinesh C. Gupta, editor
Bok Engelsk 1989 International Symposium on Semiconductor Processing
| Utgitt | Philadelphia, PA : ASTM , 1989
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|---|---|
| Omfang | 476 s. : ill.
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| Opplysninger | "The Fifth International Symposium on Semiconductor Processing was held at Santa Clara, California on 1-5 February, 1988 ..." - Forordet.
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| Emner | |
| ISBN | 0803112734
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