Handbook of thin-film deposition processes and techniques : principles, methods, equipment and applications
edited by Krishna Seshan
Bok Engelsk 2002
| Utgitt | Norwich, N.Y. : Noyes Publications , c2002
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|---|---|
| Omfang | XXVIII, 629 s. : ill.
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| Utgave | 2nd ed.
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| Emner | |
| ISBN | 0815514425
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