Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA
edited by David F. Kyser ... [et al.] ; managing editor: Daniel Halibey
Bok Engelsk 1984 Pfefferkorn Conference
| Utgitt | AMF O'Hare, Ill. : Scanning Electron Microscopy, Inc. , c1984
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|---|---|
| Omfang | VIII, 372, s. IX-XII : ill.
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| Emner | Backscattering - Congresses
Electron beams - Congresses Electron energy loss spectroscopy - Congresses Electrons - Scattering Congresses Vis mer... Microlithography - Congresses
Solids - Effect of radiation on Congresses Elektronmikroskopi Elektronstråler Faste stoffers fysikk - Elektronstråler Kondenserte fasers fysikk faststoffysikk elektronstråler elektronmikroskopi mikroanalyse mikrolitografi |
| ISBN | 0931288304
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