Ion implantation : equipment and techniques : proceedings of the fourth international conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982
editors: H. Ryssel and H. Glawischnig
Bok Språk ikke angitt 1983 International Conference on Ion Implantation: Equipment and Techniques
| Utgitt | Berlin : Springer , 1983
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|---|---|
| Omfang | x, 556 s. : ill.
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| Emner | |
| ISBN | 0387124918. - 3540124918
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