MEMS/MOEMS packaging : concepts, designs, metarials, and processes

Ken Gilleo
Bok · Engelsk · 2005

Utgitt	New York : McGraw-Hill , c2005
Omfang	XIII, 220 s. : ill.
Emner	Microelectromechanical systems Microelectronic packaging Optoelectronic devices MEMS
ISBN	0071455566