Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France, and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah
editors: Bernd O. Kolbesen ... [et al.] ; sponsored by: The Electrochemical Society, Electronics Division ; published in cooperation with: SPIE - the International Society for Optical Engineering
Bok Engelsk 2003 ALTECH 2003
| Utgitt | Pennington, N.J. : Electrochemical Society , c2003
|
|---|---|
| Omfang | XII, 556 s. : ill.
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| ISBN | 1566773482
|
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium, the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
ALTECH 99
editors: Bernd O. Kolbesen ... [et al.] ;...
Bok · Engelsk · 1999
ALTECH 99
editors: Bernd O. Kolbesen ... [et al.] ;...
Bok · Engelsk · 1999
