Micro electro mechanical systems : an investigations [sic] of micro structures, sensors, actuators, machines and robotic systems : proceedings : Oiso, Japan, January 25-18, 1994
sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center
Bok Engelsk 1994
| Annen tittel | |
|---|---|
| Utgitt | Piscataway, NJ : Institute of Electrical and Electronics Engineers , c1994
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| Omfang | XIV, 360 s. : ill.
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| Opplysninger | "... the 1994 IEEE Workshop on Micro Electro Mechanical Systems (MEMS) ..." - S. III.. - Over tittelen: IEEE
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| Emner | |
| ISBN | 0780318331. - 078031834X. - 0780318358
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