Introduction to microlithography : theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983
L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor
Bok Engelsk 1983
| Utgitt | Washington, D.C. : American Chemical Society , 1983
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| Omfang | ix, 363 s. : ill.
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| Emner | |
| ISBN | 0841207755
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