MEMS and NEMS : systems, devices, and structures

Sergey Edward Lyshevski
Bok · Engelsk · 2002 Sergey E. Lyshevski

Utgitt	Boca Raton, Fla. : CRC Press , c2002
Omfang	461 s. : ill.
Emner	MEMS Nanoteknologi microelectromechanical systems mems nanoteknologi mikroteknologi
ISBN	0849312620