Hf-based high-k dielectrics : process development, performance characterization, and reliability
Young-Hee Kim, Jack C. Lee
Bok Engelsk 2005
Utgitt | [S.l.] : Morgan & Claypool Publishers , c2005
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Omfang | X, 92 s. : ill.
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Emner | |
ISBN | 1598290045
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Utgitt | [S.l.] : Morgan & Claypool Publishers , c2005
|
---|---|
Omfang | X, 92 s. : ill.
|
Emner | |
ISBN | 1598290045
|