Spectroscopic characterization techniques for semiconductor technology IV : 25-26 March 1992, Somerset, New Jersey
Orest J. Glembocki, chair/editor ; sponsored and published by SPIE - the International Society for Optical Engineering
Bok Engelsk 1992
Utgitt | Bellingham, Wash. : SPIE , c1992
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Omfang | ix, 308 s. : ill.
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ISBN | 0819408395
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