Photomask and X-ray mask technology VI : 13-14 April 1999, Yokohama, Japan
· Hiraoki [i.e. Hiroaki] Morimoto, editor ; sponsored by Photomask Japan, BACUS, SPIE - the International Society for Optical Engineering ; cooperating organizations: Japan Society of Applied Physics ... [et al.] ; supported by Yokohama City
Bok Engelsk 1999