Microelectronic device technology II : 23-24 September 1998, Santa Clara, California


· David Burnett, Dirk Wristers, Toshiaki Tsuchiya, chairs/editors ; sponsored and published by SPIE - the International Society for Optical Engineering ; cooperating organizations: Solid State Technology, the Electrochemical Society, American Vacuum Society
Bok Engelsk 1998

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