Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat pane - detaljert visning

Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California

· John C. Stover, chair/editor ; sponsored and published by SPIE - the International Society for Optical Engineering
Bok Engelsk 1998