Microelectronic structures and MEMS for optical processing III : 29-30 September 1997, Austin, Texas
· M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored by SPIE - the International Society for Optical Engineering, SEMI - Semiconductor Equipment and Materials International, NIST - National Institute of Standards and Technology ; cooperating organization: Solid State Technology
Bok Engelsk 1997