Micromachining and microfabrication process technology III : 29-30 September 1997, Austin, Texas
· Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE - the International Society for Optical Engineering, SEMI - Semiconductor Equipment and Materials International, NIST - National Institute of Standards and Technology ; cooperating organization: Solid State Technology
Bok Engelsk 1997