In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing : 1-2 October 1997, Austin, Texas
· Damon K. DeBusk, Sergio Ajuria, chairs/editors ; sponsored and published by SPIE - the International Society for Optical Engineering ; cooperating organizations: SEMI - Semiconductor Equipment and Materials International, Solid State Technology, the Electrochemical Society
Bok Engelsk 1997