Microlithographic techniques in IC fabrication : 25-26 June 1997, Singapore
· Soon-Fatt Yoon, Raymond Yu, Chris A. Mack, chairs/editors ; sponsored by SPIE - the International Society for Optical Engineering, SPIE Singapore Chapter, Institute of Physics Singapore ; cosponsored by SPIE Japan Chapter ... [et al.] ; cooperating organizations: Nanyang Technological University (Singapore) ... [et al.]
Bok Engelsk 1997