Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies


Utgitt	Dordrecht : Kluwer Academic Publishers , c1994
Omfang	XII, 215 s. : ill.
Opplysninger	"Proceedings of the NATO Advanced Research Workshop on Nanolithography: a Borderland Between STM, EB, IB, and X-Ray Lithographies, Frascati, Roma, Italy, April 6-8, 1993" - Tittelsidens bakside
Emner	Integrated circuits - Design and construction Congresses Microlithography - Congresses Molecular electronics - Congresses Nanotechnology - Congresses Vis mer... Elektronikk Nanoteknologi Tynnfilm - Produksjon Tynnfilmteknikk elektronikk mikroelektronikk litografi nanolitografi nanoteknologi
ISBN	0792327942

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