Polymers for microelectronics : resists and dielectrics

Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor
Bok Engelsk 1994


Utgitt	Washington : American Chemical Society , 1994
Omfang	XII, 571 s. : ill.
Opplysninger	"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."
Emner	Microelectronics - Materials Polymers Mikroelektronikk - Materialer Polymere forbindelser
ISBN	0841227217

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