Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals - detaljert visning

Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices


Utgitt	Dordrecht : Kluwer Academic , c1993
Omfang	xv, 633 s. : ill.
Opplysninger	"Proceedings of the NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies, Bad Windsheim, Germany, September 21-October 2, 1992" - Tittelsidens bakside
Emner	Thin film devices - Congresses Thin films - Congresses Elektronikk Halvledere Vis mer... Lagstrukturer Tynnfilmteknikk halvledere tynne sjikt filmer lagstrukturer mikroelektronikk
ISBN	0792322657