Silicon wafer bonding technology for VLSI and MEMS applications
edited by Subramanian S. Iyer and Andre J. Auberton-Hervé
Bok Engelsk 2002
| Utgitt | London : INSPEC, Institution of Electrical Engineers , c2002
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|---|---|
| Omfang | XXV, 149 s. : ill.
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| Emner | |
| ISBN | 0852960395
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