Plasma processing of semiconductors
edited by P.F. Williams
Bok Engelsk 1997 NATO Advanced Study Institute on Plasma Processing of Semiconductors
| Utgitt | Dordrecht : Kluwer , c1997
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|---|---|
| Omfang | X, 613 s. : ill.
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| Opplysninger | "Proceedings of the NATO Advanced Study Institute on Plasma Processing of Semiconductors, Château de Bonas, France, 17-28 June, 1996" - Tittelsidens bakside
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| Emner | |
| ISBN | 0792345673
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