Sputtering by particle bombardment. 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography
Bok Engelsk 1983
| Utgitt | Berlin : Springer-Verlag , 1983
|
|---|---|
| Omfang | XII,391 s.
|
| Emner | |
| ISBN | 0387125930. - 3540125930
|
Bok Engelsk 1983
