Plasma-surface interactions and processing of materials


Utgitt	Dordrecht : Kluwer Academic Publishers , c1990
Omfang	xiii, 557 s. : ill.
Opplysninger	"Proceedings of the NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials, Alicante, Spain, September 4-16, 1988" - Tittelsidens bakside
Emner	Materials - Effect of radiation on Congresses Materials - Surfaces Congresses Microelectronics - Materials Effect of radiation on Congresses Plasma etching - Congresses Vis mer... Elektronikk Materialer Overflatefysikk Overflatekjemi Overflater Plasmafysikk Tynnfilmer materialer plasmafysikk overflater tynne filmer mikroelektronikk
ISBN	0792305841

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