Growth of single- and polycrystalline TiN and ZrN thin films by reactive sputtering : influence of low energy ion irradiation
Lars Hultman
Bok Engelsk 1988
| Utgitt | Linköping : Department of Physics and Measurement Technology, Linköping University , 1988
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| Omfang | 1 b. (flere pag.) : ill.
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| Opplysninger | Avh. (tekn. dr.) - Universitetet i Linköping, 1988.
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| Emner | |
| ISBN | 917870345X
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