Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA
editors: Daniel J. Ehrlich [and] Gregg S. Higashi [and] Modest M. Oprysko
Bok Engelsk 1988
| Utgitt | Pittsburgh, Pa. : Materials Research Society , c1988
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|---|---|
| Omfang | xv, 509 s. : ill.
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| Emner | |
| ISBN | 0931837693
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