MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA
· James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored and published by SPIE - the International Society for Optical Engineering ; cooperating organizations: SEMI - Semiconductor Equipment and Materials International, SolidState Technology, Sandia National Laboratories (USA)
Bok Engelsk 2003