MEMS components and applications for industry, automobiles, aerospace, and communication II : 27-29 January 2003, San Jose, California, USA
· Siegfried W. Janson, chair/editor ; sponsored and published by SPIE - the International Society for Optical Engineering ; cooperating organizations, SEMI - Semiconductor Equipment and Materials International, SolidState Technology, Sandia National Laboratories (USA)
Bok Engelsk 2003