Micro mechanical systems : principles and technology
edited by T. Fukuda and W. Menz
Bok Engelsk 1998
| Utgitt | New York : Elsevier , 1998
|
|---|---|
| Omfang | VIII, 268 s. : ill.
|
| Emner | Microelectromechanical systems - Handbooks, manuals, etc
mikroteknologi mikroelektronikk mikroelektromekaniske systemer mems |
| ISBN | 0444823638. - 9780444823632
|
