Proceedings of the 10th International Autumn Meeting Gettering and defect engineering in semiconductor technology : GADEST 2003, Seehotel Zeuthen (suburb of Berlin), State of Brandenburg, Germany, September 21-26, 2003
edited by H. Richter and M. Kittler
Bok Engelsk 2004 International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology"
| Utgitt | Uetikon-Zürich, Switzerland : Enfield, N.H. : SciTech Publications Ltd. ; Trans Tech Pub. [distributor] , c2004
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| Omfang | XVI, 682 s. : ill.
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| Emner | |
| ISBN | 3908450829
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