Materials and device characterization in micromachining III : 18-19 September 2000, Santa Clara, USA
· Yuli Vladimirsky, Philip J. Coane, chairs/editors ; sponsored by SPIE - the International Society for Optical Engineering ; cooperating organizations: SEMI - Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA)
Bok Engelsk 2000