Ion implantation in semiconductors : science and technology : [proceedings of the Fourth International Conference on Ion Implantation in Semiconductors and Other Materials, held at the Osaka Chamber of Commerce and Industry, August 1974]
edited by Susumu Namba
Bok Engelsk 1975 International Conference on Ion Implantation in Semiconductors and Other Materials
| Utgitt | New York : Plenum Press , c1975
|
|---|---|
| Omfang | XV, 742 s. : ill.
|
| Emner | |
| ISBN | 030630841X
|
