Reactive sputtering of cubic-phase BN:C and nanostructured B-N-C films : growth, microstructure, and - detaljert visning

Reactive sputtering of cubic-phase BN:C and nanostructured B-N-C films : growth, microstructure, and mechanical properties

Mats P. Johansson
Bok Engelsk 1998


Utgitt	Linköping : Department of Physics and Measurement Technology, Linköping University , 1998
Omfang	162 s. : ill.
Opplysninger	Avhandling (tekn. dr.) - Linköpings tekniska högskola, 1998.
Emner	Tynnfilmteknikk bornitrid-karbon
ISBN	9172193530