Materials for microlithography : radiation-sensitive polymers
Bok Engelsk 1984
Annen tittel | |
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Utgitt | Washington, D.C. : American Chemical Society , 1984
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Omfang | viii, 494 s. : ill.
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Opplysninger | Bibliographic Level Mode of Issuance: Monograph
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Emner | |
Dewey | |
ISBN | 0841208719
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