RF MEMS : Theory, Design, and Technology


Gabriel M. Rebeiz
Bok Engelsk 2004 · Electronic books.
Annen tittel
Utgitt
Hoboken : : Wiley, , 2004.
Omfang
1 online resource (507 p.)
Opplysninger
Description based upon print version of record.. - RF MEMS; CONTENTS; Preface; 1 Introduction: RF MEMS for Microwave Applications; 1.1 The Beginning of RF MEMS; 1.2 RF MEMS Configurations; 1.3 Comparison of MEMS Switches with GaAs PIN Diode and Transistor Switches; 1.4 Application Areas of RF MEMS; 1.5 Case Studies in RF MEMS; 1.5.1 Case 1: RF MEMS in Switching Networks; 1.5.2 Case 2: RF MEMS in Low-Noise, Low-Power Circuits; 1.5.3 Case 3: RF MEMS in Portable Wireless Systems; 1.5.4 Case 4: RF MEMS in Phased Arrays; 1.6 RF MEMS Development Around the World; 1.7 Integration of RF MEMS with Silicon and GaAs Electronics. - 1.8 Linearity and Intermodulation Products1.9 Hermetic or Nonhermetic Packaging; 1.10 Power Handling and Reliability; Bibliography; 2 Mechanical Modeling of MEMS Devices: Static Analysis; 2.1 Spring Constant of Fixed-Fixed Beams; 2.1.1 Spring Constant Component due to Residual Stress; 2.1.2 Nonlinear Stretching Component of the Spring Constant; 2.1.3 Critical Stress of Fixed-Fixed Beams; 2.1.4 Residual Stress and Young's Modulus of Beams Composed of Different Materials; 2.1.5 Effect of Holes in the Beam; 2.2 Spring Constant of Low-k Beams; 2.3 Spring Constant of Cantilever Beams. - 2.15 Effect of Temperature Variation2.16 Effect of Acceleration and Acoustic Forces; 2.17 Software for MEMS Analysis; Bibliography; 3 Mechanical Modeling of MEMS Devices: Dynamic Analysis; 3.1 Linear (Small Displacement) Dynamic Analysis of MEMS Beams; 3.2 Gas Fundamentals; 3.3 Damping Coefficient/Quality Factor; 3.3.1 Damping Variation Versus Height; 3.4 Nonlinear (Large-Displacement) Dynamic Analysis of MEMS Beams; 3.5 Switching and Release Time Calculations; 3.5.1 Switching Time; 3.5.2 Release Time; 3.6 Switching Mechanisms of MEMS Beams; 3.6.1 Steady-State Solution. - 2.4 Spring Constant of Circular Diaphragms2.5 Beam Curvature due to Stress Gradients; 2.6 Electrostatic Actuation; 2.7 Shape of the Deformed Beam Under Electrostatic Actuation; 2.8 DC Hold-Down Voltage of MEMS Beams and Cantilevers; 2.9 Forces on MEMS Beams; 2.10 Self-Actuation of MEMS Capacitive Switches; 2.11 RF Hold-Down Voltage of MEMS Capacitive Switches; 2.12 Capacitance Ratio in Analog Mode; 2.12.1 Three-Plate Electrostatic Designs; 2.13 Stabilization of Electrostatic Actuated Beams; 2.13.1 Charge Stabilization Techniques; 2.14 Voltage Breakdown in MEMS Devices. - 3.6.2 Velocity, Acceleration, and Current3.6.3 Effect of the Fringing Capacitance; 3.6.4 Effect of the Damping Resistance; 3.6.5 Taylored Actuation Voltage; 3.7 Switching Energy; 3.8 Response to Applied Waveforms; 3.8.1 Response to Single Waveforms; 3.8.2 Response to Multiple Waveforms; 3.8.3 Response to Amplitude-Modulated (AM) Signals; 3.8.4 Response to Frequency-Modulated (FM) Signals; 3.9 Dynamic Self-Actuation and Release Analysis of MEMS Beams; 3.10 Generation of Intermodulation Products; 3.11 Brownian Noise Analysis; Bibliography; 4 Electromagnetic Modeling of MEMS Switches. - 4.1 Introduction. - Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. This book acquaints readers with the basics of RF MEMs and describes how to design practical circuits and devices with them. The author, an acknowledged expert in the field, presents a range of real-world applications and shares many valuable tricks of the trade.
Emner
Sjanger
Dewey
ISBN
0471201693

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