Microelectromechanical structures for materials research : symposium held April 15-16, 1998, San Francisco, California, U.S.A.
editors, Stuart Brown ... [et al.]
Bok Engelsk 1998
| Utgitt | Warrendale, Pa. : Materials Research Society , cop. 1998
|
|---|---|
| Omfang | XI, 248 s. : ill.
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| Emner | |
| ISBN | 1558994246. - 9781558994249
|
