Defects of high-κ gate dielectric stacks : nano-electronic semiconductor deviced


edited by Evgeni Gusev
Bok Engelsk 2006 NATO Advanced Research Workshop on Defects in Advanced High-κ Dielectric Nano-electronic Semiconductor Devices
Utgitt
Dordrecht : Springer , c2006
Omfang
X, 492 s. : ill.
Opplysninger
"Proceedings of the NATO Advanced Research Workshop on Defects in Advanced High-κ Dielectric Nano-electronic Semiconductor Devices, St.Petersburg, Russia, July 11-14, 2005" - Tittelbladets bakside
Emner
ISBN
1402043651

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