Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California
Mehrdad M. Moslehi, Rajendra Singh, Dim-Lee Kwong, chairs/editors ; sponsored and published by SPIE - the International Society for Optical Engineering
Bok Engelsk 1992
| Utgitt | Bellingham, Wash. : SPIE , c1992
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|---|---|
| Omfang | ix, 207 s. : ill.
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| Opplysninger | "... part of a two-conference program on Rapid Thermal Processing and Metallization held at SPIE's 1991 Symposium on Microelectronic Processing Integration ..." - Side ix
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| ISBN | 0819407267
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