Polymers for microelectronics : resists and dielectrics
Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor
Bok Engelsk 1994
| Utgitt | Washington : American Chemical Society , 1994
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|---|---|
| Omfang | XII, 571 s. : ill.
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| Opplysninger | "Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."
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| Emner | |
| ISBN | 0841227217
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