Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines and systems : proceedings : Fort Lauderdale, Florida, February 7-10, 1993
sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division
Bok Engelsk 1993
| Annen tittel | |
|---|---|
| Utgitt | [New York] : Institute of Electrical and Electronics Engineers , c1993
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| Omfang | xvii, 292 s. : ill.
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| Opplysninger | "... the 1993 IEEE Workshop on Micro Electro Mechanical Systems (MEMS) ..." - Side iii.. - Over tittelen: IEEE
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| Emner | |
| ISBN | 078030957X. - 0780309588. - 0780309596
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