Plasma Electronics : Applications in Microelectronic Device Fabrication
T. Makabe
Bok Engelsk 2006 · Electronic books.
| Annen tittel | |
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| Utgitt | Hoboken : : CRC Press, , 2006.
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| Omfang | 1 online resource (355 p.)
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| Opplysninger | Description based upon print version of record.. - Front Cover; Preface; Contents; 1. Introduction; 2. Phenomenological Description of the Charged Particle Transport; 3. Macroscopic Plasma Characteristics; 4. Elementary Processes in Gas Phase and on Surfaces; 5. The Boltzmann Equation and Transport Equations of Charged Particles; 6. General Properties of Charged Particle Transport in Gases; 7. Modeling of Nonequilibrium (Low-Temperature) Plasmas; 8. Numerical Procedure of Modeling; 9. Capacitively Coupled Plasma; 10. Inductively Coupled Plasma; 11. Magnetically Enhanced Plasma; 12. Plasma Processing and Related Topics; Index. - Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition, etching, and even process monitoring and diagnosis. Plasma Electronics: Applications in Microelectronic Device Fabrication explains the fundamental physics and numerical methods necessary to bring these technologies from the laboratory to the factor
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| Emner | Plasma engineering
Applied Physics Engineering & Applied Sciences mikroelektronikk produksjon plasma |
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| Dewey | |
| ISBN | 0750309768
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